The influence of elevated temperature on degradation and lifetime prediction of thin silicon-dioxide films

dc.contributor.author	Kaczer, Ben
dc.contributor.author	Degraeve, Robin
dc.contributor.author	Pangon, Nadège
dc.contributor.author	Groeseneken, Guido
dc.contributor.imecauthor	Kaczer, Ben
dc.contributor.imecauthor	Degraeve, Robin
dc.contributor.imecauthor	Groeseneken, Guido
dc.contributor.orcidimec	Kaczer, Ben::0000-0002-1484-4007
dc.date.accessioned	2021-10-14T13:07:57Z
dc.date.available	2021-10-14T13:07:57Z
dc.date.embargo	9999-12-31
dc.date.issued	2000
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4463
dc.source.beginpage	1514
dc.source.endpage	1521
dc.source.issue	7
dc.source.journal	IEEE Trans. Electron Devices
dc.source.volume	47
dc.title	The influence of elevated temperature on degradation and lifetime prediction of thin silicon-dioxide films
dc.type	Journal article
dspace.entity.type	Publication
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