Publication:
Gate induced floating body effects in TiN/SiON and TiN/HfO2 triple gate SOI FinFETs
Date
| dc.contributor.author | Rafi, J.M. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Mercha, Abdelkarim | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | Hayama, K. | |
| dc.contributor.author | Campabadal, F. | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Mercha, Abdelkarim | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.contributor.orcidimec | Mercha, Abdelkarim::0000-0002-2174-6958 | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.date.accessioned | 2021-10-16T18:52:17Z | |
| dc.date.available | 2021-10-16T18:52:17Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12749 | |
| dc.source.beginpage | 1201 | |
| dc.source.endpage | 1210 | |
| dc.source.issue | 9 | |
| dc.source.journal | Solid-State Electronics | |
| dc.source.volume | 51 | |
| dc.title | Gate induced floating body effects in TiN/SiON and TiN/HfO2 triple gate SOI FinFETs | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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