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TXRF layer analysis for advanced micro-electronic applications: a two case study, HfO2/Si and Si/Ge
Publication:
TXRF layer analysis for advanced micro-electronic applications: a two case study, HfO2/Si and Si/Ge
Date
2005
Meeting abstract
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10722.pdf
26.31 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hellin, David
;
Rip, Jens
;
Delabie, Annelies
;
Bonzom, Renaud
;
De Gendt, Stefan
;
Vinckier, Chris
Journal
Abstract
Description
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1930
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1930
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations