Observation of stacking faults and prismatic punching systems in silicon by light scattering tomography

dc.contributor.author	Kissinger, G.
dc.contributor.author	Vanhellemont, Jan
dc.contributor.author	Claeys, Cor
dc.contributor.author	Richter, H.
dc.date.accessioned	2021-09-29T14:39:14Z
dc.date.available	2021-09-29T14:39:14Z
dc.date.embargo	9999-12-31
dc.date.issued	1996
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1299
dc.source.beginpage	191
dc.source.endpage	196
dc.source.journal	Journal of Crystal Growth
dc.source.volume	158
dc.title	Observation of stacking faults and prismatic punching systems in silicon by light scattering tomography
dc.type	Journal article
dspace.entity.type	Publication
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