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Comprehensive analysis of the impact of single and arrays of through silicon vias induced stress on high-k / metal gate CMOS performances
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1916 since deposited on 2021-10-18
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Acq. date: 2025-12-10
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1916 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2025-12-10
Citations