Publication:

Insights into Scaled Logic Devices Connected from Both Wafer Sides

Date

2022

Proceedings Paper

https://doi.org/10.1109/IEDM45625.2022.10019521

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Author(s)

Veloso, Anabela

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Matagne, Philippe

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Vermeersch, Bjorn

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Arimura, Hiroaki

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O'Sullivan, Barry

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De Keersgieter, An

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Dentoni Litta, Eugenio

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Horiguchi, Naoto

Journal

na

Statistics

1222 since deposited on 2023-05-25

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Acq. date: 2026-04-06