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Conference contributions
Thermal stability of high k layers
Publication:
Thermal stability of high k layers
Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Chao
;
Cosnier, V.
;
Chen, P.J.
;
Richard, Olivier
;
Roebben, G.
;
Maes, Jan
;
Van Elshocht, Sven
;
Bender, Hugo
;
Young, Edward
;
Van der Biest, O.
;
Caymax, Matty
;
Vandervorst, Wilfried
;
De Gendt, Stefan
;
Heyns, Marc
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1899
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1899
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations