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Influence of oxygen desorption on in-situ analysis of the surface composition during O2+ bombardment of Si
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Influence of oxygen desorption on in-situ analysis of the surface composition during O2+ bombardment of Si
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Janssens, Tom
;
Vandervorst, Wilfried
Journal
Surface Science
Abstract
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1780
since deposited on 2021-10-16
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Acq. date: 2025-12-17
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Metrics
Views
1780
since deposited on 2021-10-16
3
last month
2
last week
Acq. date: 2025-12-17
Citations