Publication:
Comprehensive study of TSUPREM4 boron diffusion modeling in SiGeC base layers under critical RTA conditions
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1965 since deposited on 2021-10-15
2last month
Acq. date: 2025-12-11
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Metrics
Views
1965 since deposited on 2021-10-15
2last month
Acq. date: 2025-12-11
Citations