Publication:
Comprehensive study of TSUPREM4 boron diffusion modeling in SiGeC base layers under critical RTA conditions
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1971 since deposited on 2021-10-15
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Acq. date: 2026-09-18
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Views
1971 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-09-18
Citations