Publication:
Comprehensive study of TSUPREM4 boron diffusion modeling in SiGeC base layers under critical RTA conditions
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1966 since deposited on 2021-10-15
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Acq. date: 2026-03-17
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Statistics
Views
1966 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-03-17
Citations