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Profiling different kind of generated defects at elevated temperatures in both SiO2 and high-k dielectrics

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1944 since deposited on 2021-10-18
9last month
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Acq. date: 2026-08-09

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Views

1944 since deposited on 2021-10-18
9last month
3last week
Acq. date: 2026-08-09

Citations