Publication:
ToF-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO2/Al2O3 oxides
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1928 since deposited on 2021-10-15
Acq. date: 2025-12-11
Citations
Metrics
Views
1928 since deposited on 2021-10-15
Acq. date: 2025-12-11
Citations