Publication:
1.5×10-9 Ω·cm² Contact Resistivity on Highly Doped Si:P Using Ge Pre-amorphization and Ti Silicidation
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
4 since deposited on 2021-10-23
Acq. date: 2026-01-07
Views
2192 since deposited on 2021-10-23
3last month
Acq. date: 2026-01-07
Citations
Metrics
Downloads
4 since deposited on 2021-10-23
Acq. date: 2026-01-07
Views
2192 since deposited on 2021-10-23
3last month
Acq. date: 2026-01-07
Citations