Publication:

Time-dependent dielectric breakdown on subnanometer EOT nMOS FinFETs

Date

2012
Journal article
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dc.contributor.authorFeijoo, Pedro C.
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorToledano Luque, Maria
dc.contributor.authorTogo, Mitsuhiro
dc.contributor.authorSan Andrés, Enrique
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorGroeseneken, Guido
dc.date.accessioned2021-10-20T10:59:29Z
dc.date.available2021-10-20T10:59:29Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.issn1530-4388
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20674
dc.source.beginpage166
dc.source.endpage170
dc.source.issue1
dc.source.journalIEEE Transactions on Device and Materials Reliability
dc.source.volume12
dc.title

Time-dependent dielectric breakdown on subnanometer EOT nMOS FinFETs

dc.typeJournal article
dspace.entity.typePublication
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