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Atomprobe tomography : meeting the metrology challenges of the next generation semiconductor technologies?
Publication:
Atomprobe tomography : meeting the metrology challenges of the next generation semiconductor technologies?
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
Journal
Abstract
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1836
since deposited on 2021-10-20
Acq. date: 2025-12-16
Citations
Metrics
Views
1836
since deposited on 2021-10-20
Acq. date: 2025-12-16
Citations