Publication:
Atomprobe tomography : meeting the metrology challenges of the next generation semiconductor technologies?
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-20T18:02:25Z | |
| dc.date.available | 2021-10-20T18:02:25Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21742 | |
| dc.source.conference | Atomprobe Workshop | |
| dc.source.conferencedate | 4/10/2012 | |
| dc.source.conferencelocation | Grenoble France | |
| dc.title | Atomprobe tomography : meeting the metrology challenges of the next generation semiconductor technologies? | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
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