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Investigating metal oxide resists for patterning 28-nm pitch structures using single exposure extreme ultraviolet: defectivity, electrical test, and voltage contrast study
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281 since deposited on 2023-03-01
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Acq. date: 2026-01-09
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1382 since deposited on 2023-03-01
2last month
Acq. date: 2026-01-09
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