Publication:
Investigating metal oxide resists for patterning 28-nm pitch structures using single exposure extreme ultraviolet: defectivity, electrical test, and voltage contrast study
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Acq. date: 2026-02-27
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319 since deposited on 2023-03-01
16last month
4last week
Acq. date: 2026-02-27
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1384 since deposited on 2023-03-01
Acq. date: 2026-02-27
Citations