Publication:
Investigating metal oxide resists for patterning 28-nm pitch structures using single exposure extreme ultraviolet: defectivity, electrical test, and voltage contrast study
Loading...
Journal
Abstract
Description
Statistics
Downloads
463 since deposited on 2023-03-01
25last month
2last week
Acq. date: 2026-08-31
Views
1394 since deposited on 2023-03-01
4last month
Acq. date: 2026-08-31
Citations
Statistics
Downloads
463 since deposited on 2023-03-01
25last month
2last week
Acq. date: 2026-08-31
Views
1394 since deposited on 2023-03-01
4last month
Acq. date: 2026-08-31
Citations