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Investigating metal oxide resists for patterning 28-nm pitch structures using single exposure extreme ultraviolet: defectivity, electrical test, and voltage contrast study
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491 since deposited on 2023-03-01
28last month
5last week
Acq. date: 2026-09-30
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1394 since deposited on 2023-03-01
Acq. date: 2026-09-30
Citations