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Investigating metal oxide resists for patterning 28-nm pitch structures using single exposure extreme ultraviolet: defectivity, electrical test, and voltage contrast study
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523 since deposited on 2023-03-01
44last month
18last week
Acq. date: 2026-10-13
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1397 since deposited on 2023-03-01
3last month
Acq. date: 2026-10-13
Citations