Publication:

Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND

Date

2024

Proceedings Paper

https://doi.org/10.1109/irps48228.2024.10529305

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Author(s)

;

Arreghini, Antonio

;

Lesniewska, Alicja

;

;

van der Veen, Marleen

;

;

Bazzazian, Nina

;

;

Van den Bosch, Geert

;

Rosmeulen, Maarten

Statistics

434 since deposited on 2024-08-16

3last month

Acq. date: 2026-10-13