Publication:
Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND
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431 since deposited on 2024-08-16
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Acq. date: 2026-08-03
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Views
431 since deposited on 2024-08-16
1last month
1last week
Acq. date: 2026-08-03
Citations