Publication:

Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND

Date

2024
Proceedings Paper
https://doi.org/10.1109/IRPS48228.2024.10529305
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dc.contributor.authorTierno, Davide
dc.contributor.authorArreghini, Antonio
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorJeong, Yongbin
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorStiers, Jimmy
dc.contributor.authorBazzazian, Nina
dc.contributor.authorCiofi, Ivan
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorRosmeulen, Maarten
dc.contributor.imecauthorTierno, D.
dc.contributor.imecauthorArreghini, A.
dc.contributor.imecauthorLesniewska, A.
dc.contributor.imecauthorJeong, Y.
dc.contributor.imecauthorvan der Veen, M. H.
dc.contributor.imecauthorStiers, J.
dc.contributor.imecauthorBazzazian, N.
dc.contributor.imecauthorCiofi, I.
dc.contributor.imecauthorVan den Bosch, G.
dc.contributor.imecauthorRosmeulen, M.
dc.date.accessioned2024-08-16T18:28:06Z
dc.date.available2024-08-16T18:28:06Z
dc.date.issued2024
dc.identifier.doi10.1109/IRPS48228.2024.10529305
dc.identifier.eisbn979-8-3503-6976-2
dc.identifier.isbn979-8-3503-6977-9
dc.identifier.issn1541-7026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44317
dc.publisherIEEE
dc.source.conferenceInternational Reliability Physics Symposium (IRPS)
dc.source.conferencedate2024-04-14
dc.source.conferencelocationGrapevine
dc.source.numberofpages5
dc.title

Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND

dc.typeProceedings paper
dspace.entity.typePublication
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