Publication:
Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND
| dc.contributor.author | Tierno, Davide | |
| dc.contributor.author | Arreghini, Antonio | |
| dc.contributor.author | Lesniewska, Alicja | |
| dc.contributor.author | Jeong, Yongbin | |
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.author | Stiers, Jimmy | |
| dc.contributor.author | Bazzazian, Nina | |
| dc.contributor.author | Ciofi, Ivan | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Rosmeulen, Maarten | |
| dc.contributor.imecauthor | Tierno, D. | |
| dc.contributor.imecauthor | Arreghini, A. | |
| dc.contributor.imecauthor | Lesniewska, A. | |
| dc.contributor.imecauthor | Jeong, Y. | |
| dc.contributor.imecauthor | van der Veen, M. H. | |
| dc.contributor.imecauthor | Stiers, J. | |
| dc.contributor.imecauthor | Bazzazian, N. | |
| dc.contributor.imecauthor | Ciofi, I. | |
| dc.contributor.imecauthor | Van den Bosch, G. | |
| dc.contributor.imecauthor | Rosmeulen, M. | |
| dc.date.accessioned | 2024-08-16T18:28:06Z | |
| dc.date.available | 2024-08-16T18:28:06Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1109/IRPS48228.2024.10529305 | |
| dc.identifier.eisbn | 979-8-3503-6976-2 | |
| dc.identifier.isbn | 979-8-3503-6977-9 | |
| dc.identifier.issn | 1541-7026 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44317 | |
| dc.publisher | IEEE | |
| dc.source.conference | International Reliability Physics Symposium (IRPS) | |
| dc.source.conferencedate | 2024-04-14 | |
| dc.source.conferencelocation | Grapevine | |
| dc.source.numberofpages | 5 | |
| dc.title | Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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