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P implantation on doping of Ge: diffusion, activation, re-crystallization
Publication:
P implantation on doping of Ge: diffusion, activation, re-crystallization
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Satta, Alessandra
;
Janssens, Tom
;
Clarysse, Trudo
;
Simoen, Eddy
;
Meuris, Marc
;
Benedetti, Alessandro
;
Hoflijk, Ilse
;
De Jaeger, Brice
;
Demeurisse, Caroline
;
Vandervorst, Wilfried
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2067
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
2067
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations