Publication:
Fin dimension influence on mechanical stressors in triple-gate SOI nMOSFETs
Date
| dc.contributor.author | Buhler, Rudolf | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Agopian, Paula | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Martino, Joao | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-21T06:51:32Z | |
| dc.date.available | 2021-10-21T06:51:32Z | |
| dc.date.issued | 2013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22093 | |
| dc.source.beginpage | 187 | |
| dc.source.conference | Advanced Semiconductor-on-Insulator Technology and Related Physics | |
| dc.source.conferencedate | 12/05/2013 | |
| dc.source.conferencelocation | Toronto Canada | |
| dc.source.endpage | 192 | |
| dc.title | Fin dimension influence on mechanical stressors in triple-gate SOI nMOSFETs | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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