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Comparative analysis of the degradation mechanisms in logic and I/O FinFET devices induced by plasma damage
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Comparative analysis of the degradation mechanisms in logic and I/O FinFET devices induced by plasma damage
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Date
2019
Proceedings Paper
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40077.pdf
3.15 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hiblot, Gaspard
;
Liu, Yefan
;
Hellings, Geert
;
Van der Plas, Geert
Journal
Abstract
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1964
since deposited on 2021-10-27
Acq. date: 2025-12-16
Citations
Metrics
Views
1964
since deposited on 2021-10-27
Acq. date: 2025-12-16
Citations