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Articles
Sub-100 nm2 cobalt interconnects
Publication:
Sub-100 nm2 cobalt interconnects
Date
2018
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dutta, Shibesh
;
Beyne, Sofie
;
Gupta, Anshul
;
Kundu, Shreya
;
Bender, Hugo
;
Van Elshocht, Sven
;
Jamieson, Geraldine
;
Vandervorst, Wilfried
;
Boemmels, Juergen
;
Wilson, Chris
;
Tokei, Zsolt
;
Adelmann, Christoph
Journal
IEEE Electron Device Letters
Abstract
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1943
since deposited on 2021-10-25
454
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1943
since deposited on 2021-10-25
454
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations