Publication:

Sub-100 nm2 cobalt interconnects

Date

2018

Journal article

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Author(s)

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Van Elshocht, Sven

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Jamieson, Geraldine

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Vandervorst, Wilfried

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Boemmels, Juergen

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Adelmann, Christoph

Journal

IEEE Electron Device Letters

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1955 since deposited on 2021-10-25

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Acq. date: 2026-08-28