Publication:

Sub-100 nm2 cobalt interconnects

Date

2018
Journal article
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dc.contributor.authorDutta, Shibesh
dc.contributor.authorBeyne, Sofie
dc.contributor.authorGupta, Anshul
dc.contributor.authorKundu, Shreya
dc.contributor.authorBender, Hugo
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAdelmann, Christoph
dc.contributor.imecauthorBeyne, Sofie
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2021-10-25T18:22:36Z
dc.date.available2021-10-25T18:22:36Z
dc.date.issued2018
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30659
dc.identifier.urlhttps://doi.org/10.1109/LED.2018.2821923
dc.source.beginpage731
dc.source.endpage734
dc.source.issue5
dc.source.journalIEEE Electron Device Letters
dc.source.volume39
dc.title

Sub-100 nm2 cobalt interconnects

dc.typeJournal article
dspace.entity.typePublication
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