Publication:

Gate-all-around transistors based on vertically stacked Si nanowires

Date

2017
Proceedings Paper
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Author(s)

Mertens, Hans  
;
Ritzenthaler, Romain  
;
Hikavyy, Andriy  
;
Kim, Min-Soo  
;
Tao, Zheng  
;
Wostyn, Kurt  
;
Schram, Tom  
;
Kunnen, Eddy
;
Ragnarsson, Lars-Ake  
;
Dekkers, Harold  
;
Hopf, Toby  
;
Devriendt, Katia  
;
Tsvetanova, Diana  
;
Chew, Soon Aik
;
Kikuchi, Yoshiaki  
;
Van Besien, Els  
;
Rosseel, Erik  
;
Mannaert, Geert  
;
De Keersgieter, An  
;
Vaisman Chasin, Adrian  
;
Kubicek, Stefan  
;
Dangol, Anish  
;
Demuynck, Steven  
;
Barla, Kathy  
;
Mocuta, Dan
;
Horiguchi, Naoto  

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1967 since deposited on 2021-10-24
Acq. date: 2025-12-11

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1967 since deposited on 2021-10-24
Acq. date: 2025-12-11

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