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Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray fluorescence
Publication:
Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray fluorescence
Date
2008
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Honicke, P.
;
Beckhoff, B.
;
Kolbe, M.
;
List, Scott
;
Conard, Thierry
;
Struyf, Herbert
Journal
Spectrochimica Acta B
Abstract
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1880
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1880
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations