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Creep characterization of Al alloy thin films for use in MEMS applications
Publication:
Creep characterization of Al alloy thin films for use in MEMS applications
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Modlinski, Robert
;
Witvrouw, Ann
;
Ratchev, Petar
;
Puers, Robert
;
den Toonder, Jaap M.J.
;
De Wolf, Ingrid
Journal
Microelectronic Engineering
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2071
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations
Metrics
Views
2071
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations