Publication:
Creep characterization of Al alloy thin films for use in MEMS applications
Date
| dc.contributor.author | Modlinski, Robert | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Ratchev, Petar | |
| dc.contributor.author | Puers, Robert | |
| dc.contributor.author | den Toonder, Jaap M.J. | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T14:55:48Z | |
| dc.date.available | 2021-10-15T14:55:48Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9310 | |
| dc.source.beginpage | 272 | |
| dc.source.endpage | 278 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 76 | |
| dc.title | Creep characterization of Al alloy thin films for use in MEMS applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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