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A new method for the lifetime determination of submicron metal interconnects by means of parallel test structure
Publication:
A new method for the lifetime determination of submicron metal interconnects by means of parallel test structure
Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanstreels, Kris
;
D'Olieslaeger, Marc
;
De Ceuninck, Ward
;
D'Haen, Jan
;
Maex, Karen
Journal
Abstract
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1958
since deposited on 2021-10-15
414
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1958
since deposited on 2021-10-15
414
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations