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Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy
Publication:
Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy
Date
2024
Journal article
https://doi.org/10.1117/1.JMM.23.4.041405
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2.51 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ciesielski, Richard
;
Bogdanowicz, Janusz
;
Loo, Roger
;
Shimura, Yosuke
;
Mani, Antonio
;
Mitterbauer, Christoph
;
Kolbe, Michael
;
Soltwisch, Victor
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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31
since deposited on 2025-01-09
Acq. date: 2025-10-25
Views
133
since deposited on 2025-01-09
Acq. date: 2025-10-25
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Downloads
31
since deposited on 2025-01-09
Acq. date: 2025-10-25
Views
133
since deposited on 2025-01-09
Acq. date: 2025-10-25
Citations