Publication:

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Date

2022
Journal article
https://doi.org/10.1002/smll.202105776
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dc.contributor.authorHoenicke, Philipp
dc.contributor.authorKayser, Yves
dc.contributor.authorNikolaev, Konstantin, V
dc.contributor.authorSoltwisch, Victor
dc.contributor.authorScheerder, Jeroen
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorSiefke, Thomas
dc.contributor.authorAndrle, Anna
dc.contributor.authorGwalt, Grzegorz
dc.contributor.authorSiewert, Frank
dc.contributor.authorDavis, Jeffrey
dc.contributor.authorHuth, Martin
dc.contributor.authorVeloso, Anabela
dc.contributor.authorLoo, Roger
dc.contributor.authorSkroblin, Dieter
dc.contributor.authorSteinert, Michael
dc.contributor.authorUndisz, Andreas
dc.contributor.authorRettenmayr, Markus
dc.contributor.authorBeckhoff, Burkhard
dc.contributor.imecauthorScheerder, Jeroen
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecScheerder, Jeroen::0000-0002-9301-0392
dc.date.accessioned2023-01-17T11:03:55Z
dc.date.available2021-12-02T02:05:44Z
dc.date.available2023-01-17T11:03:55Z
dc.date.embargo2022-02-10
dc.date.issued2022
dc.description.wosFundingTextThe authors would like to thank Vivek Rameshbhai Beladiya and Adriana Szeghalmi for depositing the HfO2-ALD deposition. Parts of this research was performed within the EMPIR projects Aeromet II and Adlab-XMet. The financial support of the EMPIR program is gratefully acknowledged. It is jointly funded by the European Metrology Programme for Innovation and Research (EMPIR) and participating countries within the European Association of National Metrology Institutes (EURAMET) and the European Union. In addition, this project has received funding from the Electronic Component Systems for European Leadership Joint Undertaking under grant agreement No 826589-MADEin4. This joint undertaking receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, France, Belgium, Germany, Czech Republic, Austria, Hungary, Israel. K.N. acknowledges the funding by the RFBR, project number 19-29-12038. A.U. and M.R. also gratefully acknowledge financial support by DFG (Inst 275/391-1). imec gratefully acknowledges the financial support by FWO-Hercules through project AKUL/15/22. Open access funding enabled and organized by Projekt DEAL.
dc.identifier.doi10.1002/smll.202105776
dc.identifier.issn1613-6810
dc.identifier.pmidMEDLINE:34821030
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38521
dc.publisherWILEY-V C H VERLAG GMBH
dc.source.beginpage2105776
dc.source.endpagena
dc.source.issue6
dc.source.journalSMALL
dc.source.numberofpages10
dc.source.volume18
dc.subject.keywordsSYNCHROTRON
dc.subject.keywordsGENERATION
dc.subject.keywordsMETROLOGY
dc.title

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

dc.typeJournal article
dspace.entity.typePublication
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