Applications of Ni-based silicides to 45 nm CMOS and beyond

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Author(s)

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Chamirian, Oxana

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Pawlak, Malgorzata

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de Potter de ten Broeck, Muriel

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Kottantharayil, Anil

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Pourtois, Geoffrey

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Lindsay, Richard

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Metrics

1981 since deposited on 2021-10-15

Acq. date: 2025-10-23