Publication:

Applications of Ni-based silicides to 45 nm CMOS and beyond

Date

2004
Proceedings Paper
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Author(s)

Kittl, Jorge
;
Lauwers, Anne  
;
Chamirian, Oxana
;
Pawlak, Malgorzata
;
Van Dal, Mark  
;
Akheyar, Amal
;
de Potter de ten Broeck, Muriel  
;
Kottantharayil, Anil
;
Pourtois, Geoffrey  
;
Lindsay, Richard
;
Maex, Karen  

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