Publication:
Nano-beam diffraction investigation of the strain evolution in SiGe channel pFETs with gate first or gate last process
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1973 since deposited on 2021-10-20
8last month
2last week
Acq. date: 2025-12-08
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Metrics
Views
1973 since deposited on 2021-10-20
8last month
2last week
Acq. date: 2025-12-08
Citations