Publication:
Nano-beam diffraction investigation of the strain evolution in SiGe channel pFETs with gate first or gate last process
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1989 since deposited on 2021-10-20
9last month
3last week
Acq. date: 2026-08-09
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Statistics
Views
1989 since deposited on 2021-10-20
9last month
3last week
Acq. date: 2026-08-09
Citations