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An ESCA study on ion beam induced oxidation of Si
Publication:
An ESCA study on ion beam induced oxidation of Si
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Date
1995
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Osiceanu, Petre
;
Alay, Josep Lluis
;
De Coster, Walter
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2066
since deposited on 2021-09-29
Acq. date: 2025-12-11
Citations
Metrics
Views
2066
since deposited on 2021-09-29
Acq. date: 2025-12-11
Citations