Publication:

Elastic backscattering during boron implantation in Si1-xGex

Date

2024

Journal article

https://doi.org/10.1016/j.vacuum.2023.112740

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Author(s)

;

Dialameh, Masoud

;

Morris, Richard

;

;

Vantomme, Andre

;

Meersschaut, Johan

Journal

VACUUM

Statistics

151 since deposited on 2024-03-01

Acq. date: 2026-01-26