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Elastic backscattering during boron implantation in Si1-xGex
Publication:
Elastic backscattering during boron implantation in Si1-xGex
Date
2024
Journal article
https://doi.org/10.1016/j.vacuum.2023.112740
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bai, Quan
;
Dialameh, Masoud
;
Morris, Richard
;
Vickridge, Ian
;
Vantomme, Andre
;
Meersschaut, Johan
Journal
VACUUM
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147
since deposited on 2024-03-01
Acq. date: 2025-10-25
Citations
Metrics
Views
147
since deposited on 2024-03-01
Acq. date: 2025-10-25
Citations