Publication:
Stress characterization of selective epitaxial Si1-xGex deposition for embedded source/drain before and after millisecond laser anneal
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1847 since deposited on 2021-10-17
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Acq. date: 2025-12-15
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Views
1847 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2025-12-15
Citations