Publication:

Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C

Date

2011
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorEl Rifai, Joumana
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorAbdel Aziz, Ahmed
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorSedky, Sherif
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.date.accessioned2021-10-19T13:22:44Z
dc.date.available2021-10-19T13:22:44Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18871
dc.source.beginpagemrsf10-1299-s02-
dc.source.conferenceMicromechanical Systems - Materials and Devices IV
dc.source.conferencedate29/11/2010
dc.source.conferencelocationBoston, MA USA
dc.title

Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions