Vertical ferroelectric HfO2 FET based on 3-D NAND architecture: towards dense low-power memory

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Author(s)

Florent, Karine

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;

Subirats, Alexandre

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Banerjee, Kaustuv

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Lavizzari, Simone

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Arreghini, Antonio

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Di Piazza, Luca

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Potoms, Goedele

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;

McMitchell, Sean

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Popovici, Mihaela Ioana

;

Groeseneken, Guido

;

Metrics

2024 since deposited on 2021-10-25

Acq. date: 2025-10-23