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Articles
The integration of high-k dielectrics: A story of modest achievements
Publication:
The integration of high-k dielectrics: A story of modest achievements
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Date
2002-09
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6726.pdf
4.38 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Caymax, Matty
;
Van Bavel, Mieke
Journal
Semiconductor Fabtech
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1771
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations
Metrics
Views
1771
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations