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The integration of high-k dielectrics: A story of modest achievements

Date

2002-09
Journal article
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dc.contributor.authorCaymax, Matty
dc.contributor.authorVan Bavel, Mieke
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVan Bavel, Mieke
dc.date.accessioned2021-10-14T21:13:01Z
dc.date.available2021-10-14T21:13:01Z
dc.date.embargo9999-12-31
dc.date.issued2002-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6089
dc.source.beginpage103
dc.source.endpage105
dc.source.issue17
dc.source.journalSemiconductor Fabtech
dc.title

The integration of high-k dielectrics: A story of modest achievements

dc.typeJournal article
dspace.entity.typePublication
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