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Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions
Publication:
Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions
Date
2002
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Duhayon, Natasja
;
Clarysse, Trudo
;
Eyben, Pierre
;
Vandervorst, Wilfried
;
Hellemans, L.
Journal
Journal of Vacuum Science & Technology B
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1903
since deposited on 2021-10-14
418
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1903
since deposited on 2021-10-14
418
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations