Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions

dc.contributor.author	Duhayon, Natasja
dc.contributor.author	Clarysse, Trudo
dc.contributor.author	Eyben, Pierre
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Hellemans, L.
dc.contributor.imecauthor	Duhayon, Natasja
dc.contributor.imecauthor	Eyben, Pierre
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.accessioned	2021-10-14T21:33:22Z
dc.date.available	2021-10-14T21:33:22Z
dc.date.issued	2002
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/6292
dc.source.beginpage	741
dc.source.endpage	746
dc.source.issue	2
dc.source.journal	Journal of Vacuum Science & Technology B
dc.source.volume	20
dc.title	Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions
dc.type	Journal article
dspace.entity.type	Publication
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