Publication:

Impact of line height on copper resistivity and interconnect RC delay: a geometry approach to reduce the size effect

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1964 since deposited on 2021-10-16
7last month
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Acq. date: 2026-03-16

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1964 since deposited on 2021-10-16
7last month
2last week
Acq. date: 2026-03-16

Citations