Publication:

Study of 3D process impact on advanced CMOS devices

Date

2013

Proceedings Paper

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Author(s)

La Manna, Antonio

;

;

Van Huylenbroeck, Stefaan

;

Sirignano, Emilio

;

Cherman, Vladimir

;

Van der Plas, Geert

;

De Wachter, Bart

;

Phommahaxay, Alain

;

;

;

Metrics

1947 since deposited on 2021-10-21

Acq. date: 2025-12-15