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A successful selective epitaxial Si1-xGex deposition process for HBT-BiCMOS and high-mobility heterojunction pMOS applications
Publication:
A successful selective epitaxial Si1-xGex deposition process for HBT-BiCMOS and high-mobility heterojunction pMOS applications
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Caymax, Matty
;
Peytier, Ivan
;
Decoutere, Stefaan
;
Collaert, Nadine
;
Verheyen, Peter
;
Vandervorst, Wilfried
;
De Meyer, Kristin
Journal
Yield Management Solutions
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1851
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1851
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations