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Raised source/drains with disposable spacers for sub 100nm CMOS technologies
Publication:
Raised source/drains with disposable spacers for sub 100nm CMOS technologies
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Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Meyer, Kristin
;
Kubicek, Stefan
;
van Meer, Hans
Journal
Abstract
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1853
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Acq. date: 2025-12-15
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Metrics
Views
1853
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-15
Citations