Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
A wet chemical method for the determination of thickness of SiO2 layers below the nanometer level
Publication:
A wet chemical method for the determination of thickness of SiO2 layers below the nanometer level
Copy permalink
Date
1999
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Smedt, Frank
;
Stevens, G.
;
De Gendt, Stefan
;
Cornelissen, Ingrid
;
Arnauts, Sophia
;
Meuris, Marc
;
Heyns, Marc
;
Vinckier, Chris
Journal
J. Electrochem. Soc.
Abstract
Description
Statistics
Views
1967
since deposited on 2021-10-06
1
last month
Acq. date: 2026-01-26
Citations
Statistics
Views
1967
since deposited on 2021-10-06
1
last month
Acq. date: 2026-01-26
Citations