Publication:
Contact-edge roughness (CER) characterization and modeling: effect of dose on CER and crtitical dimension uniformity
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1919 since deposited on 2021-10-19
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Acq. date: 2026-03-01
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Statistics
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1919 since deposited on 2021-10-19
1last month
1last week
Acq. date: 2026-03-01
Citations