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AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET
Publication:
AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET
Date
2022
Proceedings Paper
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493.08 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Filho Goncalez, Walter
;
Borga, Matteo
;
Geens, Karen
;
Cingu, Deepthi
;
Chatterjee, Urmimala
;
You, Shuzhen
;
Bakeroot, Benoit
;
Decoutere, Stefaan
;
Knaepen, Werner
;
Arnou, Panagiota
;
Homm, Pia
Journal
na
Abstract
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220
since deposited on 2021-12-03
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1522
since deposited on 2021-12-03
426
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
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Downloads
220
since deposited on 2021-12-03
125
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Views
1522
since deposited on 2021-12-03
426
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations