Publication:

AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET

Date

2022
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Accepted version 493.08 KB

Author(s)

Filho Goncalez, Walter  
;
Borga, Matteo  
;
Geens, Karen  
;
Cingu, Deepthi  
;
Chatterjee, Urmimala  
;
You, Shuzhen  
;
Bakeroot, Benoit  
;
Decoutere, Stefaan  
;
Knaepen, Werner  
;
Arnou, Panagiota  
;
Homm, Pia  

Journal

na

Abstract

Description

Metrics

Downloads

351 since deposited on 2021-12-03
77last month
12last week
Acq. date: 2025-12-12

Views

1524 since deposited on 2021-12-03
1last month
1last week
Acq. date: 2025-12-12

Citations

Metrics

Downloads

351 since deposited on 2021-12-03
77last month
12last week
Acq. date: 2025-12-12

Views

1524 since deposited on 2021-12-03
1last month
1last week
Acq. date: 2025-12-12

Citations