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AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET

Date

2022
Proceedings Paper
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dc.contributor.authorFilho Goncalez, Walter
dc.contributor.authorBorga, Matteo
dc.contributor.authorGeens, Karen
dc.contributor.authorCingu, Deepthi
dc.contributor.authorChatterjee, Urmimala
dc.contributor.authorYou, Shuzhen
dc.contributor.authorBakeroot, Benoit
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorKnaepen, Werner
dc.contributor.authorArnou, Panagiota
dc.contributor.authorHomm, Pia
dc.contributor.imecauthorFilho Goncalez, Walter
dc.contributor.imecauthorBorga, Matteo
dc.contributor.imecauthorGeens, Karen
dc.contributor.imecauthorCingu, Deepthi
dc.contributor.imecauthorChatterjee, Urmimala
dc.contributor.imecauthorYou, Shuzhen
dc.contributor.imecauthorBakeroot, Benoit
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorKnaepen, Werner
dc.contributor.imecauthorArnou, Panagiota
dc.contributor.imecauthorHomm, Pia
dc.contributor.orcidimecBorga, Matteo::0000-0003-3087-6612
dc.contributor.orcidimecGeens, Karen::0000-0003-1815-3972
dc.contributor.orcidimecChatterjee, Urmimala::0000-0002-8934-6774
dc.contributor.orcidimecBakeroot, Benoit::0000-0003-4392-1777
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.accessioned2022-11-10T14:21:02Z
dc.date.available2021-12-03T14:19:11Z
dc.date.available2022-11-10T14:21:02Z
dc.date.issued2022
dc.identifier.issnna
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38528
dc.source.conference12th International Conference on Integrated Power Electronics Systems - CIPS
dc.source.conferencedate15th to 17th of March 2022
dc.source.conferencelocationBerlin, Germany
dc.source.journalna
dc.source.numberofpages5
dc.subject.disciplineElectrical & electronic engineering
dc.title

AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET

dc.typeProceedings paper
dspace.entity.typePublication
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