Investigation of light-induced deep-level defect activation at the AlN/Si interface

Visalli, Domenica; Van Hove, Marleen; Leys, Maarten; Derluyn, Joff; Simoen, Eddy; Srivastava, Puneet; Geens, Karen; Degroote, Stefan; Germain, Marianne; Nguyen, Anh Phuc Duc; Stesmans, Andre; Borghs, Gustaaf

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Investigation of light-induced deep-level defect activation at the AlN/Si interface

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2011

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Applied Physics Express

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Investigation of light-induced deep-level defect activation at the AlN/Si interface

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